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July 2004 |
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A comprehensive review article titled “Chemical
Mechanical Planarization for Microelectronic Materials” by
Parshuram B. Zantye, Ashok Kumar and Arun Sikder has been published
in Volume 45, issue 3-6 of Materials Science and Engineering-R
(Reports). Materials Science and Engineering-R is a very
prestigious and highly rated journal in the field of Materials
Science. The Journal Citation Reports (JCR)-2003
gives an impact factor of 10.032 to Materials Science and
Engineering Reports-R (impact factor of Nature is 30.979). The
article is currently available online on the journal web site.
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The paper,
‘Characterization of Ba0.5Sr0.5TiO3
Thin Films for DRAM Applications’ was presented as invited talk
by Ashok Kumar, Sriraj G. Manavalan at 2nd
International Conference on Thin Film 2004 and Nanotech 2004, July
13-17, 2004, Singapore
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The paper,
“Nanoscale Silicon Microcavity DNA Biosensor”, was presented by
Arun Kumar, Souheil Zekri, Shree R Singh and Ashok Kumar at 2nd
International Conference on Thin Film 2004 and Nanotech 2004, July
13-17, 2004, Singapore
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The paper, “Study of Interfacial
Properties of Multilayered Thin Films for Cu Interconnects
Applications”, was presented by Parshuram B. Zantye, Arun K.
Sikder, and Ashok Kumar at 2nd International Conference
on Thin Film 2004 and Nanotech 2004, July 13-17, 2004, Singapore
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April 2004 |
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The paper,
“Tribological Issues and Modeling of Removal Behavior of the Doped
and Undoped SiO2 Interlayer Dielectric Planarization” was
presented by A. K. Sikder,
Swetha Thagella, Parshuram Zantye Ashok Kumar
and
Jiro Yota, at MRS Spring Meeting, San Francisco, April 12-16,
(2004)
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The paper, “Structural and Electrical
Properties of Ba0.5Sr0.5TiO3
Thin Films for Tunable Microwave Applications”, was presented by
Sriraj .G. Manavalan, A.K. Sikder, Ashok Kumar and T. Weller at
MRS Spring Meeting, San Francisco, April 12-16, (2004)
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The paper, “Effect
of Annealing on the Structural, Mechanical and Tribological
Properties of Electroplated Cu Thin Films” was presented by P.
Shukla, P. Zantye, A. K. Sikder, Ashok Kumar and Mahesh
Sanganaria, at MRS Spring Meeting, San Francisco, April 12-16,
(2004)
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The paper, “Investigation
of the Interfacial Adhesion and its Correlation with Chemical
Mechanical Polishing for Various Low-k and Cu-low k Multi-layered
Thin Films” was presented by Parshuram B. Zantye, Arun K.
Sikder, and Ashok Kumar at MRS Spring Meeting, San Francisco, April
12-16, (2004)
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The
paper, “Non-destructive
Evaluation Method For Psiloquest’s Application Specific Pads (ASP)
For CMP Applications” was presented by Parshuram B. Zantye,
Arun K. Sikder, Ashok Kumar and Yaw Obeng at MRS Spring Meeting,
San Francisco, April 12-16, (2004)
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The
paper, “Evaluation
of the Tribological Properties and Wear Rate of Different
Semiconductor Grade Plastic Materials for Contact Retaining Ring
Application” was presented by William G. Easter, Parshuram
Zantye, Arun K Sikder and Ashok Kumar at MRS Spring Meeting, San
Francisco, April 12-16, (2004)
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March 2004 |
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Sadiya Hassan
presented a poster at
AVS (Florida
Chapter) & Florida Society for Microscopy Joint Sym., Orlando,
(2004) on “Quality Evaluation of the Slurries used in Chemical
Mechanical Polishing” and got
second prize.
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Brian
Brantly
presented a poster at
AVS (Florida
Chapter) & Florida Society for Microscopy Joint Sym., Orlando,
(2004) on “Solid
State Gas sensor For Ammonia Detection Based on Polyaniline
Multi-walled Carbon Nanotubes and TiO2”
and got third prize.
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Thomas Gressle
presented a poster at
AVS (Florida
Chapter) & Florida Society for Microscopy Joint Sym., Orlando,
(2004) on “, “Sol-Gel and Carbon
Nanotubes Based Microelectrode fro Simultaneous Detection of Glucose
and Insulin” and got honorable mention.
- Parshuram B.
Zantye
presented a poster at AVS (Florida Chapter) & Florida Society for
Microscopy Joint Sym., Orlando, (2004) on “Investigation of
Different Annealing Conditions with Interfacial Adhesion
Multilayered Thin Films for Cu Interconnect Application”
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Raghu Mudhivarti
presented a poster at AVS (Florida Chapter) & Florida Society for
Microscopy Joint Sym., Orlando, (2004) on “ Dynamic Mechanical
Analysis of Chemical Mechanical Polishing (CMP) Pads”
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December 2003 |
- The paper, Tribo-mechanical characterization of ultra low-k
materials for integration in Cu-damascene process, Ashok Kumar,
A. K. Sikder, Parshuram Zantye, presented at IUMRS-Singapore,
December
2003
- The paper, Evaluation of mechanical properties of electroplated Cu
thin films during chemical mechanical Planarization process, A. K.
Sikder, Pallavi Shukla, Parshuram Zantye, Ashok Kumar, and M.K.
Sanganaria, presented at IUMRS-Singapore, 2003,
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November 2003 |
- Miss Swetha Thagella has been selected as a
recipient of the Graduate Council Outstanding Masters Thesis
Prize.
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October 2003 |
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Mr. Daniel Braley (Advisse: Dr. Kumar), NSF funded REU student,
presented a paper in the Biomaterials poster session at the Inspire
Conference and he receive first place and $400 cash prize.
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The paper, Integration Issues in Cu-interconnects, Parshuram
Zantye, A. K. Sikder, A. Kumar, was presented at 204 th ECS Meeting,
October 2003, Orlando, FL
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The paper, Evaluation of the Properties of Polyurethane Pads and
their Correlation to the Performance in the CMP Process, Parshuram
Zantye,A. K. Sikder, A. Kumar, A. Belyaev, I. Tarasov, S. Ostapenko
and Julie Harmon, was presented at 204 th ECS Meeting, October
2003, Orlando, FL
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The paper, Nanocrystalline diamond Thinfilms for Tools and Other
Applications, Z. Xu,A. K. Sikder, A. Kumar, was presented at
204 th ECS Meeting, October 2003, Orlando, FL
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April 2003 |
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Dr. Ashok Kumars advisee, Nivedita Gulati, an
undergraduate
student from Department of Mechanical Engineering, wins the first
prize in
College of Engineering Research Experience for Undergraduate (REU)
student poster competition, April 2003
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The paper,Evaluation of mechanical and tribological properties of
ultra-low k dielectric materials for their integration in Cu damascene
structures, Parshuram Zantye, A. K. Sikder and A. Kumar, presented
at MRS Spring Meeting, 2003, San Francisco, CA
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The paper, Delamination behavior of Cu-low-k stack under different
slurries, A. K. Sikder, P. Zantye, S. Thagella and Ashok Kumar,
presented
at MRS Spring Meeting, 2003, San Francisco, CA
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The paper, Polishing behavior of interlayer films in Cu damascene
process with different barrier and Cu selective slurries, A. K. Sikder,Parshuram Zantye and Ashok Kumar, presented at MRS Spring Meeting,
2003,
San Francisco, CA
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March 2003 |
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The paper, Study of slurry selectivity and endpoint detection in
Cu CMP process, P.B. Zantye, A. K. Sikder, N. Gulati and Ashok Kumar,
presented at CMPMIC Conf., March 2003, Los Angeles, CA
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The paper, Delamination studies in Cu-ultra low-k stack,
A. K. Sikder, P. Zantye, S. Thagella and Ashok Kumar, B. Michael
Vinogradov, and Norm V. Gitis, presented at CMPMIC Conf. March 2003,
LA
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Poster, Study of Tribological
Properties and Modeling of Removal Rate of Low-k Films in Chemical
Mechanical Planarization by Swetha Thagella,
presented at AVS/FMS Symposium, March 2003 at Orlando, FL, wins the
second prize in student poster competition
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Poster, Analysis of the Defects during the Implementation of
Cu-Ultra low-k Damascene Structures by Parshuram Zantye,
presented at AVS/FMS Symposium, March 2003, Orlando, FL, wins an
honorable mention in student poster competition
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